Semiconductor hydride gas
GeH4Monogermane (GeH4)
Grade 5.0 germane for germanium and silicon-germanium process requirements, reviewed only in the documented 44/47 L cylinder configuration.
Germanium process precursor
One package. A fully defined requirement.
Monogermane is used as a germanium source in controlled semiconductor process environments. It is an extremely flammable, toxic compressed gas, so the enquiry must identify the process, cylinder count, destination, site interface, handling controls and documentation expected by the receiving team.
Reference quality evidence
Grade 5.0 specification and reference batch results
| Component | Product limit | Reference batch result |
|---|---|---|
| GeH4 purity | ≥99.999% | >99.999% |
| O2 + Ar | ≤0.5 ppmv | 0.10 ppmv |
| N2 | ≤2.0 ppmv | 0.84 ppmv |
| CO2 | ≤2.0 ppmv | 0.01 ppmv |
| CO | ≤1.0 ppmv | 0.01 ppmv |
| CH4 | ≤1.0 ppmv | 0.01 ppmv |
| H2O | ≤1.0 ppmv | 0.53 ppmv |
| H2 | ≤50 ppmv | 1.20 ppmv |
Quality boundary. The results shown are from one reference batch and do not define every future delivery. Final quality is determined by the agreed product specification and the Certificate of Analysis for the supplied batch.
Approved commercial format
Packaging and connection
| Package | Nominal filling quantity | Valve connection |
|---|---|---|
| 44/47 L cylinder | 2 kg | CGA 632 |
Configuration boundary. Package acceptance, equipment condition, route and delivery basis are confirmed for the specific enquiry. Safety, handling and transport decisions must follow the current SDS and shipment documents.
Two document roles
SDS identity. Verified batch results.
The available SDS identifies germane, CAS 7782-65-2, and documents a composition of ≥99.999%. The reference CoA provides the impurity limits and results shown above; the CoA issued for the supplied batch remains the release evidence for that shipment.
Review our quality documentation approach and industrial gas packaging guidance. Public SDS download support is being prepared separately and will only use approved current documents.
For a useful quotation
Define the cylinder requirement and process limits.
State the germanium-process context, cylinder count and impurity limits so technical, documentation and route reviews can be completed against one defined requirement.
Start a GeH4 enquiry- Required cylinder count and quantity
- Target quality and impurity limits
- Application and end use
- 44/47 L cylinder, 2 kg, CGA 632
- Tare ownership
- Destination country and city
- Required delivery date
- CoA, SDS and transport documents