Semiconductor hydride gas

SiH4

Monosilane (SiH4)

Electronic-grade silane for silicon-containing semiconductor process requirements, available for review in three package scales with DISS 632 connections.

High-pressure gas cylinders in an industrial filling area
Representative high-pressure gas packaging context. Final equipment, markings and shipment configuration are confirmed for each order.
ProductMonosilane / SiH4
Declared SDS composition≥99.9999%
Transport identityUN 2203
Valve connectionDISS 632

Silicon process precursor

Match package scale to consumption.

Monosilane is used as a silicon source in controlled semiconductor process environments. Because it is a compressed, extremely flammable gas, an actionable enquiry must connect the process and consumption profile to package size, site interface, destination, handling controls and required documents.

Chemical formulaSiH4
CASCAS 7803-62-5
Transport classClass 2.1
Release evidenceCertificate of Analysis

Approved commercial formats

Packaging and nominal filling quantity

PackageNominal filling quantityValve connection
47 L cylinder10 kgDISS 632
Y-cylinder125 kgDISS 632
Tube trailer3,910 kgDISS 632

Configuration boundary. Package availability, filling quantity, equipment acceptance, route and delivery basis are confirmed for the specific enquiry.

Two document roles

SDS identity. Batch-specific release.

The available SDS declares a SiH4 composition of ≥99.9999% and identifies the material as UN 2203, Class 2.1. It defines safety and transport context; it does not establish the analytical result for a future shipment.

Quality boundary. Final purity, individual impurity limits and analytical results are defined only by the agreed product specification and the Certificate of Analysis for the supplied batch. Review our quality documentation approach, Safety Data Sheet register and industrial gas packaging guidance. Safety, handling and transport decisions must follow the current approved SDS and shipment documents.

For a useful quotation

Define process demand and package scale.

State the silicon-process context and consumption requirement first; the commercial review can then match it to a cylinder, Y-cylinder or tube-trailer format. Review the confirmed formats, DISS 632 connection and receiving questions in our SiH4 and GeH4 packaging guide.

Start a SiH4 enquiry
  • Required quantity and package count
  • Target purity and impurity limits
  • Application and end use
  • 47 L cylinder, Y-cylinder or tube trailer
  • Tare ownership
  • Destination country and city
  • Required delivery date
  • CoA, SDS and transport documents