Electronic specialty gas
SiH4Monosilane (SiH4)
Electronic-grade silane for semiconductor process enquiries, supplied in approved high-integrity packages with DISS 632 connections.

Semiconductor process supply
Package-specific silane enquiries.
Monosilane is a compressed, extremely flammable gas used in controlled process environments. Every enquiry is reviewed against the application, quantity, package, destination, handling requirements and supporting documentation.
Approved commercial formats
Packaging and nominal filling quantity
| Package | Nominal filling quantity | Valve connection |
|---|---|---|
| 47 L cylinder | 10 kg | DISS 632 |
| Y-cylinder | 125 kg | DISS 632 |
| Tube trailer | 3,910 kg | DISS 632 |
Configuration boundary. Package availability, filling quantity, equipment acceptance, route and delivery basis are confirmed for the specific enquiry.
Quality and safety basis
Documented for the supplied batch.
The available SDS declares a SiH4 composition of ≥99.9999% and identifies the product as UN 2203, Class 2.1. The SDS composition declaration is not a batch-specific Certificate of Analysis.
Quality boundary. Final purity, individual impurity limits and analytical results are defined only by the agreed product specification and the Certificate of Analysis for the supplied batch. Safety, handling and transport decisions must follow the current SDS and shipment documents.
For a useful quotation
Define the SiH4 requirement.
Select one of the approved package formats and include the process and delivery context.
Start a SiH4 enquiry- Required quantity and package count
- Target purity and impurity limits
- Application and end use
- 47 L cylinder, Y-cylinder or tube trailer
- Tare ownership
- Destination country and city
- Required delivery date
- CoA, SDS and transport documents
