Electronic specialty gas

SiH4

Monosilane (SiH4)

Electronic-grade silane for semiconductor process enquiries, supplied in approved high-integrity packages with DISS 632 connections.

High-pressure gas cylinders in an industrial filling area
Representative high-pressure gas packaging context. Final equipment, markings and shipment configuration are confirmed for each order.
ProductMonosilane / SiH4
Declared SDS composition≥99.9999%
Transport identityUN 2203
Valve connectionDISS 632

Semiconductor process supply

Package-specific silane enquiries.

Monosilane is a compressed, extremely flammable gas used in controlled process environments. Every enquiry is reviewed against the application, quantity, package, destination, handling requirements and supporting documentation.

Chemical formulaSiH4
CASCAS 7803-62-5
Transport classClass 2.1
Release evidenceCertificate of Analysis

Approved commercial formats

Packaging and nominal filling quantity

PackageNominal filling quantityValve connection
47 L cylinder10 kgDISS 632
Y-cylinder125 kgDISS 632
Tube trailer3,910 kgDISS 632

Configuration boundary. Package availability, filling quantity, equipment acceptance, route and delivery basis are confirmed for the specific enquiry.

Quality and safety basis

Documented for the supplied batch.

The available SDS declares a SiH4 composition of ≥99.9999% and identifies the product as UN 2203, Class 2.1. The SDS composition declaration is not a batch-specific Certificate of Analysis.

Quality boundary. Final purity, individual impurity limits and analytical results are defined only by the agreed product specification and the Certificate of Analysis for the supplied batch. Safety, handling and transport decisions must follow the current SDS and shipment documents.

For a useful quotation

Define the SiH4 requirement.

Select one of the approved package formats and include the process and delivery context.

Start a SiH4 enquiry
  • Required quantity and package count
  • Target purity and impurity limits
  • Application and end use
  • 47 L cylinder, Y-cylinder or tube trailer
  • Tare ownership
  • Destination country and city
  • Required delivery date
  • CoA, SDS and transport documents