Electronic specialty gas
TMSTMS (Trimethylsilane)
Ultra-high-purity trimethylsilane for semiconductor processing and other impurity-sensitive applications, supplied against an agreed technical specification.
Semiconductor processing
Specification-led supply for sensitive processes.
TMS is supplied for technical processes where trace moisture, hydrocarbons, silane species and metals must be controlled. A useful enquiry defines the application, required quantity, package, destination and any tighter impurity limits.
Quality parameters
Typical product specification
| Parameter | Typical limit | Method |
|---|---|---|
| TMS purity | ≥99.999% | GC |
| Moisture (H2O) | ≤1 ppm | Moisture meter |
| Total hydrocarbons | ≤1 ppm | GC |
| SiH4 | ≤2 ppm | GC |
| Other methylsilanes | ≤2 ppm | GC |
| N2 | ≤1 ppm | GC |
| Other chlorosilanes | ≤1 ppm | GC |
| CO2 | ≤1 ppm | GC |
| O2 + Ar | ≤2 ppm | GC |
| CO | ≤2 ppm | GC |
| Specified metallic impurities | ≤5 ppb each | ICP-MS / ICP-OES |
Quality boundary. Values above describe a typical product specification. Final product quality is defined only by the agreed specification and the Certificate of Analysis for the specific batch.
Methods of analysis
Gas-phase and trace-metal control.
Gas chromatography (GC) is used for purity and gaseous impurities; moisture is measured with a dedicated moisture meter; specified metals are assessed by ICP-MS or ICP-OES as applicable.
For a useful quotation
Define the TMS requirement.
Share the process context and required limits so the commercial offer can be matched to the application.
Start a TMS enquiry- Required quantity
- Target purity and impurity limits
- Application and end use
- Preferred cylinder or container
- Tare ownership
- Destination country and city
- Required delivery date
- Required documents